What Is a Thermal Desorption Analyzer?
A thermal desorption analyzer system detects hydrogen desorbed from the surface of a sample as it undergoes heating. This system provides information on the quantity of hydrogen present in the sample and the mechanism of hydrogen adsorption and desorption. The system mainly consists of a vacuum chamber, a sample heating mechanism, an exhaust system, and a quadrupole mass spectrometer.
One application field is semiconductor devices. In this field, hydrogen is considered the most difficult impurity to control, and its effect on device performance has been ignored until now due to the difficulty of detection.
In recent times, however, the importance of impurity hydrogen has begun to be recognized, as it has been reported as a cause of instability in thin-film transistor operation and unintended carrier doping.
High-sensitivity hydrogen detection is required for further improvement of device quality and development of next-generation devices, and the thermal desorption analyzer can meet this demand.
The hydrogen desorption/desorption analyzer has advantages over other methods in terms of low cost and simple instrument configuration. Other applications include advanced thin film materials, such as graphene.