What Is a Piezo Stage?
The piezoelectric effect is the deformation of certain crystals or ceramics when a voltage is applied. Stages that utilize this phenomenon for precise linear motion, rotation, or other positional changes are known as piezo stages.
Piezo stages are highly valued in scientific research and industrial applications for their nanometer-order fine movement, position resolution, precise position reproducibility, and the ability to integrate with encoders for accurate feedback systems.
Uses of Piezo Stages
Characterized by their fine movement, high position resolution, and precise reproducibility, piezo stages are used for:
- Linear motion stages
- Rotation stages
- Scales and tipping stages
- Precise equipment movement and positioning
- Vibration isolation systems
- High-speed precision shutter systems
These applications span across scientific research and industrial fields.
Principle of Piezo Stages
Piezo stages are based on the piezoelectric effect, where specific types of ceramics deform in response to applied voltage. The deformation correlates with the voltage, is reversible, and responds extremely quickly.
Piezo actuators, formed from piezo elements, are used as positioning mechanisms in these stages. Unlike conventional motor-driven stages, piezo stages offer high position resolution and repeatability, efficient load handling with low power, and rapid response, making them ideal for applications requiring precise and fast positioning.
Advantageous for their non-reliance on magnets, piezo stages are unaffected by magnetic fields and do not disrupt their surroundings. They are also suitable for vacuum environments.
However, larger movements necessitate additional mechanical support, and the heat generated by the piezo element, as well as its temperature-dependent deformation, must be considered.