What Is an XYZ Vacuum Stage?
An XYZ vacuum stage is a precision platform capable of fine movement in three dimensions (X, Y, and Z axes). Equipped with micrometers for precise adjustments down to 0.01 mm, it features multiple screw holes for attaching optical components and can include a magnet for secure placement on optical tables.
Uses of XYZ Vacuum Stages
XYZ vacuum stages are versatile tools for accurately positioning sample holders, heating mechanisms, and optical elements in research and industrial applications. They are particularly useful in laser systems for adjusting mirrors and lenses within the optical path.
Principle of XYZ Vacuum Stages
These stages operate on different guiding systems for movement:
- Cross Roller Guide System: Provides high rigidity and precision with linear contact rollers, minimizing friction and allowing fine adjustments.
- Dovetail Groove Guide System: Offers a cost-effective solution with a simple design, suitable for basic positioning tasks.
- Ball Guide System: Features balls arranged between guides for reduced thickness, high rigidity, and precise control.
Features of XYZ Vacuum Stages
Key features include:
- High-precision positioning with micrometers and cross-roller bearings.
- Compatibility with ultra-high vacuum environments for advanced scientific research.
- High-temperature resistance, suitable for processes requiring baking up to 200°C.
Other Information on XYZ Vacuum Stages
Positioning methods vary from manual adjustments observed through cameras to fully automated systems utilizing visual sensors for enhanced accuracy and efficiency. Applications include semiconductor exposure processes and screen printing, where precise positioning is critical.