What Is a Thermal Oxidizer?
A Thermal Oxidizer, also known as Thermal Oxidation Equipment, is a specialized device used in the semiconductor industry for forming silicon thermal oxidation films on wafers.
In these machines, hydrogen gas and oxygen gas are introduced into a heated environment, triggering a thermal oxidation reaction on the surface of heated wafers. This process naturally oxidizes the wafer, resulting in the creation of a silicon thermal oxidation film.
The equipment is highly valued for its ability to form stable oxide films without requiring vacuum or pressurized conditions. As a fundamental technology for film formation, thermal oxidizers play a crucial role in various industrial applications, particularly in semiconductor manufacturing.