What Is a Positioning Stage?
Positioning stages are devices designed for precise positioning in various applications, notably in semiconductor and display manufacturing. These platforms are capable of moving with high precision, thanks to the integration of motors and ball screws. Their versatility allows for movement in multiple dimensions, such as XY stages that move freely in two-dimensional spaces.
Applications
Used across precision processing fields, positioning stages facilitate tasks in semiconductor manufacturing, display inspection, and more. They’re crucial for the precise positioning of wafers, substrates, and for the alignment of camera and fiber optics, among other uses.
Operating Principle
Comprising an actuator, control unit, moving stage, and guides, positioning stages operate by controlling signals to the actuator. They employ various control methods to accurately position the stage, adhering to the Abbe principle to minimize measurement errors.
Varieties of Positioning Stages
Positioning stages range from single-axis to complex three-axis types, with rotary and combination variants available. The choice depends on the application’s specific movement and precision requirements.
- Single to Three-Axis: From simple one-directional movement to complex three-dimensional positioning.
- Rotary and Combination: Enable rotational movement and combinations of linear and rotational axes for comprehensive motion capabilities.
Construction Details
Key components include ball screws for friction reduction and linear guides for stage support, ensuring precise and smooth movement. Control devices vary from open-loop to fully-closed control, tailoring the stage’s operation to specific applications.
Additional Insights
Distinguishing between intermittent and continuous positioning methods allows for application-specific movement strategies. Drive mechanisms primarily include rotary and linear motors, each offering unique advantages in terms of speed, accuracy, and structural simplicity.